Spray coating of photoresist for three dimensional micromachining

Spin, Spray coating and Electrodeposition of photoresist for MEMS structures – A comparison

This paper presents three coating methods of photoresist, spin, spray and electrodeposition (ED) on large topography surfaces. Characteristics of each method as well as its advantage and disadvantages are outlined. A comparison is made to point out the most suitable coating method in terms of complexity, costs and type of

Acoustic micromachining of three-dimensional surfaces for biological applications.

We present the use of an accessible micromachining technique (acoustic micromachining) for manufacturing micron-feature surfaces with non-discretely varying depth. Acoustic micromachining allows for non-photolithographic production of metal templates with programmable spatial patterns and involves the use of standard acoustic, cutting and electroplating equipment for mass production of vinyl re...

Three Dimensional Integration and Packaging Using Silicon Micromachining

Optimal Trajectory Planning for Spray Coating

Single-shot two-photon exposure of commercial photoresist for the production of three-dimensional structures.

We report the use of an amplified femtosecond laser for single-shot two-photon exposure of the commercial photoresist SU-8. By scanning of the focal volume through the interior of the resist, three-dimensional (3-D) structures are fabricated on a shot-by-shot basis. The 800-nm two-photon exposure and damage thresholds are 3.2 and 8.1TW/cm(2), respectively. The nonlinear nature of the two-photon...